Properties of Crystalline Silicon

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Properties of Crystalline Silicon

Properties of Crystalline Silicon

Name: Properties of Crystalline Silicon
ISBN: 9781591248712

Hull, Robert(eds.)

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Silicon, as used in silicon chips, is the material on which the information society depends for its power to process information. In 1988 INSPEC published the standard reference source on silicon properties and since then an enormous amount of Si R&D has taken place, with a hundred thousand papers published over 1989-1998. Now, for the benefit of academics, process developers and device simulation engineers working in the area of silicon microelectronics Prof. Hull has brought together the specialized expertise of over 100 invited authors from the USA, Japan and Europe coordinated by 18 chapter editors to concisely review its properties in a structured way.

种类:

Engineering

年:

1999

出版社:

Institution of Engineering and Technology

语言:

english

页:

1042

ISBN 10:

159124871X